For Moore's Law it has always been clear that it was going to end due to the size of atoms, it just slowed down earlier and faster than expected. EUV is at least 10 years late and no elegant solution has been found. It is still very difficult, complicated and expensive. I know somebody who works on EUV sources. The optics are even more difficult than the light sources. For the whole system, you get milliwatts on the wafer for megawatts of electrical power to the EUV source. But it's starting to work just well enough that it makes sense to use it.